We report a comprehensive nano-mechanical investigation of sputter-deposited CoNiAl ferromagnetic shape memory alloy thin films, highlighting the influence of cobalt and aluminium compositions. Thin films of Co(30+x)Ni35Al(35−x) [x = 0, 5, 10] with a thickness of 600 nm were deposited on silicon substrates at room temperature using dc magnetron sputtering, followed by vacuum annealing at 400 °C. XRD structural analysis confirmed the formation of CoNiAl alloys, with the presence of CoNi and AlNi intermetallic phases. High-magnification FESEM and optical microscopy images demonstrated uniform deposition and grains without any cracks, pinholes, or irregularities. AFM studies confirmed smooth surface topology with nanoscale roughness. The magnetic measurements (Field cooling-heating) revealed a phase transition in Co40Ni35Al25 from Austenite to Martensite below ~250 K, which is a less symmetric phase recognized for its shape memory capabilities. Nanomechanical tests demonstrated several mechanical characteristics, such as hardness, elastic modulus, depth recovery ratio, and coefficient of friction, which decreased with increased cobalt percentage in the CoNiAl alloy thin films. The results suggest that among these CoNiAl films, the films with higher cobalt percentage and operating below ~250 K are appropriate for a variety of mechanical features and shape memory device applications. Graphical Abstract