【中文摘要】近年来，在PVD制备金属-碳多元薄膜过程中，发现了原位自发形成纳米多层结构的奇特现象。基于此，本项目提出开展多元碳基薄膜制备过程中纳米多层结构的原位自形成机制、可控制备及性能研究。选择不同的复合元素，利用不同制备技术，通过调节工艺参数，设计和制备一系列多元薄膜，系统研究纳米多层结构与复合元素、制备技术、沉积参数之间耦合作用机制，探讨纳米多层结构自发形成的起因和驱动力，在原子尺度上建立自形成机理模型，实现纳米多层结构原位可控制备。研究自形成纳米多层结构对薄膜力学性能（硬度、韧性、应力）和摩擦学性能（环境自适应性）的影响，明确薄膜结构-性能之间的关系规律。通过研究，加深对薄膜生长中原子之间相互作用的认识，掌握纳米多层结构自形成机制及可控制备规律，进一步丰富和完善薄膜生长机理；同时，可以充分利用纳米多层结构自形成特征，为新型高强高韧纳米多层薄膜的设计与制备提供支持，具有重要的理论意义和应用价值。【英文摘要】In recent years, in-situ self-organized nano-multilayer structure has been observed in metal-carbon multicomponent carbon films deposited by PVD technology. Driven by this interesting phenomenon, this project aims to carry out a deep study on in-situ self-organized mechanism, controllable preparation and properties of nano-multilayer structure during the multicomponent carbon films. A series of multiple composite films have been prepared by choosing different types of composite elements, adopting various preparation techniques and adjusting the deposition parameters. Moreover, the influence of composite elements, preparation techniques and deposition parameters on the structure of nano-multilayer was systematically researched. Based on these researches, the origin and driving force of spontaneously formed nano-multilayer structure were explored elaborately, which helps to establish the self-organization mechanism model on the atomic scale and achieve the controllable preparation of nano-multilayer structure. In addition, in order to get a comprehensive understanding of the relationship between the structure and performance of the film, the effects of self-organized nano-multilayer structure on the mechanical(hardness, toughness, stress) and tribological properties (environmental self-adaption) of films were investigated in detail. The research achievements of the project not only enhance the understanding of the interactions of growth atoms, but also provide a thorough cognition of self-organized nano-multilayer structure, which has significantly theoretical and practical values for designing the new generation of films with high strength and toughness.