NbN, NbN-Ag and NbN/NbN-Ag multilayer nanocomposite films were successfully deposited by an arc ion plating system (AIP), and their microstructures, mechanical and tribological properties were systematically investigated. The results show that all the films had a polycrystalline structure, and the Ag in the Ag-doped films existed independently as a face-centered cubic phase. The content of Ag in NbN-Ag and NbN/NbN-Ag films was 20.11 and 9.07 at.%, respectively. NbN films fabricated by AIP technique had excellent mechanical properties, and their hardness and critical load were up to 44 GPa and 34.6 N, respectively. The introduction of Ag into NbN films obviously reduced the friction coefficient at room temperature, while the mechanical properties and wear resistance were degraded sharply in comparison with that of NbN films. However, the NbN/NbN-Ag films presented better hardness, H/E*, H3/E*2, adhesive strength and wear resistance than NbN-Ag films. Additionally, analysis of wear surfaces of the studied films and Al2O3 balls using 3D images, depth profiles, energy dispersive spectrometry (EDS) and Raman spectra indicated that the main wear mechanisms of NbN and NbN/NbN-Ag films were adhesive and oxidation wear with slight abrasive wear, while the severe abrasive and oxidation wear were the dominant wear mechanism for NbN-Ag films.
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