【中文摘要】类金刚石薄膜在金属表面弱结合以及其摩擦学行为对环境敏感性强等问题是限制该类薄膜在空间技术、高技术无油润滑系统广泛应用的主要瓶颈。本项目主要采用复合气相沉积技术，采用多层梯度或过渡层设计在金属表面制备具有高结合强度的类金刚石碳膜；通过抗磨与润滑多相复合技术，制备具有非晶/纳米晶特殊结构的纳米复合类金刚石薄膜,并最终获得低应力、优异摩擦学性能和低环境敏感性的碳基复合薄膜。通过研究，突破了类金刚石碳基复合薄膜在各种金属表面的可靠结合和均匀施镀、硬度与韧性匹配等关键技术，发展了几类在特殊环境如高真空、氦气气氛、水环境下具有低摩擦、优异耐磨性和一定环境自适应特性的非晶-纳米晶碳基复合薄膜，揭示了薄膜在多环境下的低摩擦成因和磨损失效机理，为该类薄膜在空间技术和高技术装备无油润滑系统的应用奠定了理论依据和技术支持。发表Sci论文16篇，申请中国发明专利4件，形成了一支特色鲜明的碳基薄膜研究团队
【英文摘要】The poor adhesion strength on metal substrates and the high environmental-sensitivity in tribological performance of diamond-like carbon films greatly restricted their wide applications in space technology, oil-free mechanical systems. The main objective of this research project is to develop high performance carbon-based films with low internal stress and low environment-sensitivity, and obtain the DLC films with better adhesion strength on metals by the design of multi-layers or gradient layers, fabricate the nanocomposite carbon films with nanocrystalline/amorphous structure by multi-phase and multi-component doping methods. Results demonstrated the carbon-based films with high adhesion strength on different metal substrates, and good balance of high hardness and toughness were fabricated and the obtained films exhibited low friction, excellent anti-wear properties and environmental-adaptive behavior in high vacuum, helium gas atmosphere and water environments; The low friction behavior and the failure mechanism of such carbon films in multi-environments were revealed. 16 SCI international-peer reviewed papers have been published and 4 Chinese patents have been applied, and as well as a unique research group on carbon-based films was cultivated.
【结题摘要】类金刚石薄膜在金属表面弱结合以及其摩擦学行为对环境敏感性强等问题是限制该类薄膜在空间技术、高技术无油润滑系统广泛应用的主要瓶颈。本项目主要采用复合气相沉积技术，采用多层梯度或过渡层设计在金属表面制备具有高结合强度的类金刚石碳膜；通过抗磨与润滑多相复合技术，制备具有非晶/纳米晶特殊结构的纳米复合类金刚石薄膜,并最终获得低应力、优异摩擦学性能和低环境敏感性的碳基复合薄膜。通过研究，突破了类金刚石碳基复合薄膜在各种金属表面的可靠结合和均匀施镀、硬度与韧性匹配等关键技术，发展了几类在特殊环境如高真空、氦气气氛、水环境下具有低摩擦、优异耐磨性和一定环境自适应特性的非晶-纳米晶碳基复合薄膜，揭示了薄膜在多环境下的低摩擦成因和磨损失效机理，为该类薄膜在空间技术和高技术装备无油润滑系统的应用奠定了理论依据和技术支持。发表Sci论文16篇，申请中国发明专利4件，形成了一支特色鲜明的碳基薄膜研究团队