The (CrNbTiAlV)N-x high-entropy nitride films were fabricated by adjusting nitrogen flow via magnetron sputtering. The microstructure, mechanical, electrochemical and tribocorrosion performances of the films were studied. The results show that the films transform from amorphous to nanocrystalline structure as nitrogen flow increased. The nanocrystalline films show super hardness (> 40 GPa) and adhesion strength (> 50 N). The amorphous film has a pretty anti-corrosion in static corrosion, while not in tribocorrosion condition. The film deposited at nitrogen flow of 38 sccm exhibits the optimal tribocorrosion performance in artificial seawater, with the highest open circuit potential (similar to - 0.1 V vs. Ag/AgCl), the lowest friction coefficient (similar to 0.162) and wear rate (similar to 7.48 x 10(-7) mm(3) N-1 m(-1)). (C) 2022 Published by Elsevier Ltd on behalf of The editorial office of Journal of Materials Science & Technology.
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